Abstract
The experimental demonstration of a high efficiency silicon nitride grating coupler is reported for wavelengths from λ = 1.25 to 1.45 μm for TE polarization. At the resonant angle, a coupling efficiency higher than 60% has been measured.
Original language | English |
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Article number | 4347702 |
Pages (from-to) | 162-164 |
Number of pages | 3 |
Journal | IEEE International Conference on Group IV Photonics GFP |
DOIs | |
Publication status | Published - 15 Oct 2007 |
Event | 2007 4th International Conference on Group IV Photonics, GFP 2007 - Duration: 19 Sept 2007 → 21 Sept 2007 |
Keywords
- Grating coupler
- Microphotonics
- Silicon nitride
- Waveguide