A micromachined device describing over a hundred orders of parametric resonance

Yu Jia, Sijun Du, Emmanuelle Arroyo, Ashwin A Seshia

Research output: Contribution to journalArticlepeer-review


Parametric resonance in mechanical oscillators can onset from the periodic modulation of at least one of the system parameters, and the behaviour of the principal (1st order) parametric resonance has long been well established. However, the theoretically predicted higher orders of parametric resonance, in excess of the first few orders, have mostly been experimentally elusive due to the fast diminishing instability intervals. A recent paper experimentally reported up to 28 orders in a micromachined membrane oscillator. This paper reports the design and characterisation of a micromachined membrane oscillator with a segmented proof mass topology, in an attempt to amplify the inherent nonlinearities within the membrane layer. The resultant oscillator device exhibited up to over a hundred orders of parametric resonance, thus experimentally validating these ultra-high orders as well as overlapping instability transitions between these higher orders. This research introduces design possibilities for the transducer and dynamic communities, by exploiting the behaviour of these previously elusive higher order resonant regimes.
Original languageEnglish
Article number171901
JournalApplied Physics Letters
Publication statusPublished - 24 Apr 2018

Bibliographical note

Copyright © 2018 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Appl. Phys. Lett. 112, 171901 (2018); and may be found at https://doi.org/10.1063/1.5024667


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