TY - JOUR
T1 - A polarimetric sensor based on nanoporous free standing membranes
AU - Bettotti, P.
AU - Kumar, N.
AU - Pavesi, L.
AU - Alvarez, J.
AU - Hill, D.
PY - 2012/12/1
Y1 - 2012/12/1
N2 - A polarimetric sensor with state of the art sensitivity is developed using free standing porous silicon membranes. The use of an optimized etching receipt greatly reduces the pore roughness. Depolarization factors are thus limited and material birefringence is increased. Free standing membranes are fabricated in n-type substrates and characterized both from the optical and structural point of view. The proposed approach is fully CMOS compatible and can therefore pave the way to the development of cheap microarray that exploits multiplexing capabilities while keeping the amount of analyte required by the analysis down to the microliter level.
AB - A polarimetric sensor with state of the art sensitivity is developed using free standing porous silicon membranes. The use of an optimized etching receipt greatly reduces the pore roughness. Depolarization factors are thus limited and material birefringence is increased. Free standing membranes are fabricated in n-type substrates and characterized both from the optical and structural point of view. The proposed approach is fully CMOS compatible and can therefore pave the way to the development of cheap microarray that exploits multiplexing capabilities while keeping the amount of analyte required by the analysis down to the microliter level.
UR - http://www.scopus.com/inward/record.url?scp=84873974428&partnerID=8YFLogxK
UR - https://ieeexplore.ieee.org/document/6411315
U2 - 10.1109/ICSENS.2012.6411315
DO - 10.1109/ICSENS.2012.6411315
M3 - Conference article
AN - SCOPUS:84873974428
SN - 1930-0395
JO - IEEE Sensors Proceedings
JF - IEEE Sensors Proceedings
T2 - 11th IEEE SENSORS 2012 Conference
Y2 - 28 October 2012 through 31 October 2012
ER -