AFM oxidation of Ti for nanoscale IC applications

Daniel Hill; Sascha Sadewasser; Xavier Aymerich

AFM oxidation of Ti for nanoscale IC applications

Daniel Hill^*, Sascha Sadewasser, Xavier Aymerich

^*Corresponding author for this work

Aston Institute of Photonic Technologies (AiPT)

Research output: Contribution to journal › Conference article › peer-review

Abstract

Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO ₂. The focus of this work is on the conductive AFM performed topographical and electrical characterization of these structures.

Original language	English
Pages (from-to)	665-668
Number of pages	4
Journal	Design and Nature
Volume	6
Publication status	Published - 17 Nov 2004
Event	Design and Nature II: Comparing Design in Nature with Science and Engineering - Rhodes, Greece Duration: 28 Jun 2004 → 30 Jun 2004

Cite this

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title = "AFM oxidation of Ti for nanoscale IC applications",

abstract = "Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO 2. The focus of this work is on the conductive AFM performed topographical and electrical characterization of these structures.",

author = "Daniel Hill and Sascha Sadewasser and Xavier Aymerich",

year = "2004",

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T1 - AFM oxidation of Ti for nanoscale IC applications

AU - Hill, Daniel

AU - Sadewasser, Sascha

AU - Aymerich, Xavier

PY - 2004/11/17

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N2 - Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO 2. The focus of this work is on the conductive AFM performed topographical and electrical characterization of these structures.

AB - Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO 2. The focus of this work is on the conductive AFM performed topographical and electrical characterization of these structures.

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M3 - Conference article

AN - SCOPUS:7744233166

SN - 1478-0585

VL - 6

SP - 665

EP - 668

JO - Design and Nature

JF - Design and Nature

T2 - Design and Nature II: Comparing Design in Nature with Science and Engineering

Y2 - 28 June 2004 through 30 June 2004

ER -

AFM oxidation of Ti for nanoscale IC applications

Abstract

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