Abstract
A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 µm.
Keywords
- laser diode source
- channelled spectrum
- linear CCD array
- low coherence interferometric sensor
- broadband source
- 1.5 mm