Femtosecond laser microfabrication of subwavelength structures in photonics

Vladimir Mezentsev, Jovana Petrovic, Mykhaylo Dubov, Ian Bennion, Jürgen Dreher, Holger Schmitz, Rainer Grauer

Research output: Chapter in Book/Published conference outputConference publication


This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.
Original languageEnglish
Title of host publicationLaser-based micro- and nanopackaging and assembly
EditorsWilhelm Pfleging, Yongfeng Lu, Kunihiko Washio, Friedrich G. Bachmann, Willem Hoving
Number of pages11
ISBN (Print)978-0-8194-6572-6
Publication statusPublished - 13 Mar 2007
EventLaser-based micro- and nanopackaging and assembly - San Jose, CA, United States
Duration: 22 Jan 200724 Jan 2007

Publication series

NameSPIE proceedings
ISSN (Print)0277-786X


ConferenceLaser-based micro- and nanopackaging and assembly
Country/TerritoryUnited States
CitySan Jose, CA

Bibliographical note

Vladimir Mezentsev ; Jovana S. Petrovic ; Mykhaylo Dubov ; Ian Bennion ; Jürgen Dreher ; Holger Schmitz and Rainer Grauer, "Femtosecond laser microfabrication of subwavelength structures in photonics", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (March 13, 2007); doi:10.1117/12.705800.

Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.



  • light propagation
  • photonic devices
  • photonics
  • ultrashort pulses
  • femtosecond laser inscription
  • self-focusing threshold
  • subwavelength structures


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