Method of detecting of thin-film coating thickness by means of 0.63-μ laser radiation

V. P. Osipov; V. N. Chijevski; D. V. Shabrov

doi:10.1117/12.751941

Method of detecting of thin-film coating thickness by means of 0.63-μ laser radiation

V. P. Osipov^*, V. N. Chijevski, D. V. Shabrov

^*Corresponding author for this work

Aston Institute of Photonic Technologies (AiPT)

Research output: Contribution to journal › Conference article › peer-review

Abstract

It is described the express optical method of evaluation of thin-film coatings, deposited on metal or semiconductor surface. For the tested samples of enamel-covered duralumin it is found the linear dependence of maximal intensity and half-width of secondary radiation on the thickness of the coating.

Original language	English
Article number	673213
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6732
DOIs	https://doi.org/10.1117/12.751941
Publication status	Published - 28 Jun 2007
Event	International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus Duration: 28 May 2007 → 1 Jun 2007

Keywords

Film thickness measurement
Solid surface detecting
Thin film testing

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10.1117/12.751941

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title = "Method of detecting of thin-film coating thickness by means of 0.63-μ laser radiation",

abstract = "It is described the express optical method of evaluation of thin-film coatings, deposited on metal or semiconductor surface. For the tested samples of enamel-covered duralumin it is found the linear dependence of maximal intensity and half-width of secondary radiation on the thickness of the coating.",

keywords = "Film thickness measurement, Solid surface detecting, Thin film testing",

author = "Osipov, {V. P.} and Chijevski, {V. N.} and Shabrov, {D. V.}",

year = "2007",

month = jun,

day = "28",

doi = "10.1117/12.751941",

language = "English",

volume = "6732",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

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note = "International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies ; Conference date: 28-05-2007 Through 01-06-2007",

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T1 - Method of detecting of thin-film coating thickness by means of 0.63-μ laser radiation

AU - Osipov, V. P.

AU - Chijevski, V. N.

AU - Shabrov, D. V.

PY - 2007/6/28

Y1 - 2007/6/28

N2 - It is described the express optical method of evaluation of thin-film coatings, deposited on metal or semiconductor surface. For the tested samples of enamel-covered duralumin it is found the linear dependence of maximal intensity and half-width of secondary radiation on the thickness of the coating.

AB - It is described the express optical method of evaluation of thin-film coatings, deposited on metal or semiconductor surface. For the tested samples of enamel-covered duralumin it is found the linear dependence of maximal intensity and half-width of secondary radiation on the thickness of the coating.

KW - Film thickness measurement

KW - Solid surface detecting

KW - Thin film testing

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UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6732/1/Method-of-detecting-of-thin-film-coating-thickness-by-means/10.1117/12.751941.short

U2 - 10.1117/12.751941

DO - 10.1117/12.751941

M3 - Conference article

AN - SCOPUS:36248973064

SN - 0277-786X

VL - 6732

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 673213

T2 - International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies

Y2 - 28 May 2007 through 1 June 2007

ER -

Method of detecting of thin-film coating thickness by means of 0.63-μ laser radiation

Abstract

Keywords

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