Optimizing the Substrate-To-Piezoelectric Thickness Ratio of Micro-Fabricated Aln-on-Si Vibration Energy Harvesting

Yu Jia; Emanuelle Arroyo; Ashwin A. Seshia

doi:10.1109/PowerMEMS59329.2023.10417446

Optimizing the Substrate-To-Piezoelectric Thickness Ratio of Micro-Fabricated Aln-on-Si Vibration Energy Harvesting

Yu Jia^*, Emanuelle Arroyo, Ashwin A. Seshia

^*Corresponding author for this work

Research output: Chapter in Book/Published conference output › Conference publication

Abstract

Cantilever is a popular design choice for MEMS vibration energy harvesting due to its high responsiveness to ambient kinetic agitations. Design optimizations have been extensively covered in the literature within the two-dimensional topological space. As with any MEMS process, topological optimization is often easier and more cost effective to carry out than thickness or material stack optimization, as the fabrication process does not need to be altered for the former. This paper outlines a thickness ratio optimization between the substrate and piezoelectric layers. Over an order of magnitude improvement in power density was experimentally observed, and a peak power of 384\ \mu \mathrm{W} within a 1 cm2 die area was attained for 0.6 g and 558 Hz of excitation within 5 mbar vacuum condition.

Original language	English
Title of host publication	PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
Publisher	IEEE
Pages	135-138
Number of pages	4
ISBN (Electronic)	9798350344219
DOIs	https://doi.org/10.1109/PowerMEMS59329.2023.10417446
Publication status	Published - 5 Feb 2024
Event	2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2023 - Abu Dhabi, United Arab Emirates Duration: 11 Dec 2023 → 14 Dec 2023

Publication series

Name	PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

Conference

Conference	2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2023
Country/Territory	United Arab Emirates
City	Abu Dhabi
Period	11/12/23 → 14/12/23

Bibliographical note

Publisher Copyright:
© 2023 IEEE.

Keywords

cantilever
MEMS
piezoelectric
thickness
vibration energy harvesting

Access to Document

10.1109/PowerMEMS59329.2023.10417446

Cite this

Jia, Y., Arroyo, E., & Seshia, A. A. (2024). Optimizing the Substrate-To-Piezoelectric Thickness Ratio of Micro-Fabricated Aln-on-Si Vibration Energy Harvesting. In PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (pp. 135-138). (PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications). IEEE. https://doi.org/10.1109/PowerMEMS59329.2023.10417446

Jia, Yu ; Arroyo, Emanuelle ; Seshia, Ashwin A. / Optimizing the Substrate-To-Piezoelectric Thickness Ratio of Micro-Fabricated Aln-on-Si Vibration Energy Harvesting. PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications. IEEE, 2024. pp. 135-138 (PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications).

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abstract = "Cantilever is a popular design choice for MEMS vibration energy harvesting due to its high responsiveness to ambient kinetic agitations. Design optimizations have been extensively covered in the literature within the two-dimensional topological space. As with any MEMS process, topological optimization is often easier and more cost effective to carry out than thickness or material stack optimization, as the fabrication process does not need to be altered for the former. This paper outlines a thickness ratio optimization between the substrate and piezoelectric layers. Over an order of magnitude improvement in power density was experimentally observed, and a peak power of 384\ \mu \mathrm{W} within a 1 cm2 die area was attained for 0.6 g and 558 Hz of excitation within 5 mbar vacuum condition.",

keywords = "cantilever, MEMS, piezoelectric, thickness, vibration energy harvesting",

author = "Yu Jia and Emanuelle Arroyo and Seshia, {Ashwin A.}",

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Jia, Y, Arroyo, E & Seshia, AA 2024, Optimizing the Substrate-To-Piezoelectric Thickness Ratio of Micro-Fabricated Aln-on-Si Vibration Energy Harvesting. in PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications. PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, IEEE, pp. 135-138, 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2023, Abu Dhabi, United Arab Emirates, 11/12/23. https://doi.org/10.1109/PowerMEMS59329.2023.10417446

Optimizing the Substrate-To-Piezoelectric Thickness Ratio of Micro-Fabricated Aln-on-Si Vibration Energy Harvesting. / Jia, Yu; Arroyo, Emanuelle; Seshia, Ashwin A.
PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications. IEEE, 2024. p. 135-138 (PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications).

Research output: Chapter in Book/Published conference output › Conference publication

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AU - Jia, Yu

AU - Arroyo, Emanuelle

AU - Seshia, Ashwin A.

PY - 2024/2/5

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N2 - Cantilever is a popular design choice for MEMS vibration energy harvesting due to its high responsiveness to ambient kinetic agitations. Design optimizations have been extensively covered in the literature within the two-dimensional topological space. As with any MEMS process, topological optimization is often easier and more cost effective to carry out than thickness or material stack optimization, as the fabrication process does not need to be altered for the former. This paper outlines a thickness ratio optimization between the substrate and piezoelectric layers. Over an order of magnitude improvement in power density was experimentally observed, and a peak power of 384\ \mu \mathrm{W} within a 1 cm2 die area was attained for 0.6 g and 558 Hz of excitation within 5 mbar vacuum condition.

AB - Cantilever is a popular design choice for MEMS vibration energy harvesting due to its high responsiveness to ambient kinetic agitations. Design optimizations have been extensively covered in the literature within the two-dimensional topological space. As with any MEMS process, topological optimization is often easier and more cost effective to carry out than thickness or material stack optimization, as the fabrication process does not need to be altered for the former. This paper outlines a thickness ratio optimization between the substrate and piezoelectric layers. Over an order of magnitude improvement in power density was experimentally observed, and a peak power of 384\ \mu \mathrm{W} within a 1 cm2 die area was attained for 0.6 g and 558 Hz of excitation within 5 mbar vacuum condition.

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Jia Y, Arroyo E, Seshia AA. Optimizing the Substrate-To-Piezoelectric Thickness Ratio of Micro-Fabricated Aln-on-Si Vibration Energy Harvesting. In PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications. IEEE. 2024. p. 135-138. (PowerMEMS 2023 - 2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications). doi: 10.1109/PowerMEMS59329.2023.10417446

Optimizing the Substrate-To-Piezoelectric Thickness Ratio of Micro-Fabricated Aln-on-Si Vibration Energy Harvesting

Abstract

Publication series

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Bibliographical note

Keywords

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