Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization

Keyphrases

• Active Learning 100%
• Material Removal Rate 100%
• Deep Kernel 100%
• Chemical Mechanical Planarization 100%
• Rate Prediction 100%
• Semi-supervised Regression 100%
• Labeled Sample 66%
• Virtual Metrology 66%
• Planarization 66%
• Unlabeled Samples 66%
• Phase Matching 33%
• Feature Extraction 33%
• Gaussian Process 33%
• Gaussian Process Regression 33%
• Process-based 33%
• Data-centric 33%
• Regression Model 33%
• Learning Model 33%
• Regression Algorithm 33%
• Result Prediction 33%
• Physics-based 33%
• Cluster-based 33%
• Mean Square Error 33%
• Full Use 33%
• Training Base 33%
• Matching Algorithm 33%
• Stacking Model 33%
• Phase Partitioning 33%
• Deep Network 33%
• Regression Training 33%
• Sample Selection Strategy 33%
• Learning Sample 33%
• Sample Proportion 33%
• Regression Learning 33%
• Co-training 33%

Engineering

• Material Removal Rate 100%
• Chemical Mechanical Polishing 100%
• Planarization 100%
• Experimental Result 50%
• Gaussians 50%
• Feature Extraction 50%
• Gaussian Model 50%
• Selection Strategy 50%
• Mean Square Error 50%
• Matching Algorithm 50%
• Learning Sample 50%

Computer Science

• Active Learning 100%
• Unlabeled Sample 66%
• gaussian process model 33%
• Experimental Result 33%
• Selection Strategy 33%
• Matching Algorithm 33%
• Deep Feature 33%
• Sample Proportion 33%
• Feature Extraction 33%