Shock reliability enhancement for MEMS vibration energy harvesters with nonlinear air damping as a soft stopper

Shao-Tuan Chen; Sijun Du; Emmanuelle Arroyo; Yu Jia; Ashwin A Seshia

doi:10.1088/1361-6439/aa82ed

Shock reliability enhancement for MEMS vibration energy harvesters with nonlinear air damping as a soft stopper

Shao-Tuan Chen, Sijun Du, Emmanuelle Arroyo, Yu Jia, Ashwin A Seshia

Mechanical, Biomedical & Design Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This paper presents a novel application of utilising nonlinear air damping as a soft mechanical stopper to increase the shock reliability for microelectromechanical systems (MEMS) vibration energy harvesters. The theoretical framework for nonlinear air damping is constructed for MEMS vibration energy harvesters operating in different air pressure levels, and characterisation experiments are conducted to establish the relationship between air pressure and nonlinear air damping coefficient for rectangular cantilever MEMS micro cantilevers with different proof masses. Design guidelines on choosing the optimal air pressure level for different MEMS vibration energy harvesters based on the trade-off between harvestable energy and the device robustness are presented, and random excitation experiments are performed to verify the robustness of MEMS vibration energy harvesters with nonlinear air damping as soft stoppers to limit the maximum deflection distance and increase the shock reliability of the device.

Original language	English
Article number	104003
Journal	Journal of Micromechanics and Microengineering
Volume	27
Issue number	10
DOIs	https://doi.org/10.1088/1361-6439/aa82ed
Publication status	Published - 20 Sept 2017

Bibliographical note

©2017 IOP Publishing Ltd. After the Embargo Period, the full text of the Accepted Manuscript may be made available on the non-commercial repository for anyone with an internet connection to read and download. After the Embargo Period a CC BY-NC-ND 3.0 licence applies to the Accepted Manuscript, in which case it may then only be posted under that CC BY-NC-ND licence provided that all the terms of the licence are adhered to, and any copyright notice and any cover sheet applied by IOP is not deleted or modified.

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10.1088/1361-6439/aa82ed

Shock reliability enhancement for MEMS vibration energy harvesters with nonlinear air damping as a soft stopper
©2017 IOP Publishing Ltd. After the Embargo Period, the full text of the Accepted Manuscript may be made available on the non-commercial repository for anyone with an internet connection to read and download. After the Embargo Period a CC BY-NC-ND 3.0 licence applies to the Accepted Manuscript, in which case it may then only be posted under that CC BY-NC-ND licence provided that all the terms of the licence are adhered to, and any copyright notice and any cover sheet applied by IOP is not deleted or modified.
Accepted author manuscript, 27.3 MBLicence: CC BY-NC-ND 3.0

Cite this

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title = "Shock reliability enhancement for MEMS vibration energy harvesters with nonlinear air damping as a soft stopper",

abstract = "This paper presents a novel application of utilising nonlinear air damping as a soft mechanical stopper to increase the shock reliability for microelectromechanical systems (MEMS) vibration energy harvesters. The theoretical framework for nonlinear air damping is constructed for MEMS vibration energy harvesters operating in different air pressure levels, and characterisation experiments are conducted to establish the relationship between air pressure and nonlinear air damping coefficient for rectangular cantilever MEMS micro cantilevers with different proof masses. Design guidelines on choosing the optimal air pressure level for different MEMS vibration energy harvesters based on the trade-off between harvestable energy and the device robustness are presented, and random excitation experiments are performed to verify the robustness of MEMS vibration energy harvesters with nonlinear air damping as soft stoppers to limit the maximum deflection distance and increase the shock reliability of the device.",

author = "Shao-Tuan Chen and Sijun Du and Emmanuelle Arroyo and Yu Jia and Seshia, {Ashwin A}",

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AU - Seshia, Ashwin A

N1 - ©2017 IOP Publishing Ltd. After the Embargo Period, the full text of the Accepted Manuscript may be made available on the non-commercial repository for anyone with an internet connection to read and download. After the Embargo Period a CC BY-NC-ND 3.0 licence applies to the Accepted Manuscript, in which case it may then only be posted under that CC BY-NC-ND licence provided that all the terms of the licence are adhered to, and any copyright notice and any cover sheet applied by IOP is not deleted or modified.

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N2 - This paper presents a novel application of utilising nonlinear air damping as a soft mechanical stopper to increase the shock reliability for microelectromechanical systems (MEMS) vibration energy harvesters. The theoretical framework for nonlinear air damping is constructed for MEMS vibration energy harvesters operating in different air pressure levels, and characterisation experiments are conducted to establish the relationship between air pressure and nonlinear air damping coefficient for rectangular cantilever MEMS micro cantilevers with different proof masses. Design guidelines on choosing the optimal air pressure level for different MEMS vibration energy harvesters based on the trade-off between harvestable energy and the device robustness are presented, and random excitation experiments are performed to verify the robustness of MEMS vibration energy harvesters with nonlinear air damping as soft stoppers to limit the maximum deflection distance and increase the shock reliability of the device.

AB - This paper presents a novel application of utilising nonlinear air damping as a soft mechanical stopper to increase the shock reliability for microelectromechanical systems (MEMS) vibration energy harvesters. The theoretical framework for nonlinear air damping is constructed for MEMS vibration energy harvesters operating in different air pressure levels, and characterisation experiments are conducted to establish the relationship between air pressure and nonlinear air damping coefficient for rectangular cantilever MEMS micro cantilevers with different proof masses. Design guidelines on choosing the optimal air pressure level for different MEMS vibration energy harvesters based on the trade-off between harvestable energy and the device robustness are presented, and random excitation experiments are performed to verify the robustness of MEMS vibration energy harvesters with nonlinear air damping as soft stoppers to limit the maximum deflection distance and increase the shock reliability of the device.

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Shock reliability enhancement for MEMS vibration energy harvesters with nonlinear air damping as a soft stopper

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