Solid phase epitaxial regrowth of ion implanted silicon on sapphire using rapid thermal annealing

A.M. Hodge, N.G. Chew, A.G. Cullis

Research output: Chapter in Book/Published conference outputChapter

Fingerprint

Dive into the research topics of 'Solid phase epitaxial regrowth of ion implanted silicon on sapphire using rapid thermal annealing'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Physics