The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machining

Tuan Anh Mai*, Bernold Richerzhagen, Paul C. Snowdon, David Wood, Paul G. Maropoulos

*Corresponding author for this work

    Research output: Contribution to journalConference articlepeer-review


    The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet® (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

    Original languageEnglish
    JournalProceedings of SPIE - International Society for Optical Engineering
    Publication statusPublished - 2007
    EventLaser-based micro- and nanopackaging and assembly - San Jose, CA, United States
    Duration: 22 Jan 200724 Jan 2007

    Bibliographical note

    Copyright 2007 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.


    • Laser microjet®
    • MEMS
    • Micro-machining
    • Water guided laser


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